Inventor

BARNES MICHAEL SCOTT

US7 patents

⚠️ This page may combine multiple inventors who share the name “BARNES MICHAEL SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US5838529ANov 17, 1998

Low voltage electrostatic clamp for substrates such as dielectric substrates

LAM RES CORP125 citations96

US5805408ASep 8, 1998

Electrostatic clamp with lip seal for clamping substrates

LAM RES CORP86 citations94

DORSEY GAGE CO INC

2 patents

USRE37580EMar 12, 2002

Guard ring electrostatic chuck

DORSEY GAGE CO INC49 citations93

USRE37541EFeb 5, 2002

Electrostatic chuck with reference electrode

DORSEY GAGE CO INC3 citations60

APPLIED MATERIALS INC

2 patents

US7244672B2Jul 17, 2007

Selective etching of organosilicate films over silicon oxide stop etch layers

APPLIED MATERIALS INC36 citations92

US7183201B2Feb 27, 2007

Selective etching of organosilicate films over silicon oxide stop etch layers

APPLIED MATERIALS INC1 citations51

IBM

1 patent

US5650032AJul 22, 1997

Apparatus for producing an inductive plasma for plasma processes

IBM92 citations93