Inventor
HATTORI SEITARO
JP3 patents
Patents
3 patentsUS7462678B2Dec 9, 2008
Film forming composition, process for producing film forming composition, insulating film forming material, process for forming film, and silica-based film
JSR CORP16 citations82
US7291567B2Nov 6, 2007
Silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device
JSR CORP16 citations82
US7556860B2Jul 7, 2009
Laminate and method of forming the same, insulating film, and semiconductor device
JSR CORP6 citations59