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Inventor

MAGUIRE THOMAS L

US6 patents
⚠️ This page may combine multiple inventors who share the name “MAGUIRE THOMAS L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CAVENDISH KINETICS INC

3 patents
US9711290B2Jul 18, 2017

Curved RF electrode for improved Cmax

CAVENDISH KINETICS INC0 citations51
US8921953B2Dec 30, 2014

Method for MEMS device fabrication and device formed

CAVENDISH KINETICS INC0 citations49
US9487395B2Nov 8, 2016

Method of forming planar sacrificial material in a MEMS device

CAVENDISH KINETICS INC1 citations45

LACEY JOSEPH DAMIAN GORDON

1 patent
US8124527B2Feb 28, 2012

CMP process flow for MEMS

LACEY JOSEPH DAMIAN GORDON3 citations57

RENAULT MICKAEL

1 patent
US8513043B2Aug 20, 2013

Method for MEMS device fabrication and device formed

RENAULT MICKAEL0 citations44

TROY BRIAN I

1 patent
US8921165B2Dec 30, 2014

Elimination of silicon residues from MEMS cavity floor

TROY BRIAN I0 citations38