Inventor

LU YUN-CHEN

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LU YUN-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US7250370B2Jul 31, 2007

Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties

TAIWAN SEMICONDUCTOR MFG19 citations91

CHANG HUI-LIN

1 patent

US8158521B2Apr 17, 2012

Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties

CHANG HUI-LIN9 citations81