Inventor

OBAMA SHINJI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OBAMA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ICHINO TAKAMASA

2 patents

US8329054B2Dec 11, 2012

Plasma processing apparatus and plasma processing method

ICHINO TAKAMASA14 citations80

US8186300B2May 29, 2012

Plasma processing apparatus

ICHINO TAKAMASA4 citations59

HITACHI HIGH TECH CORP

1 patent

US9566821B2Feb 14, 2017

Plasma processing apparatus and plasma processing method

HITACHI HIGH TECH CORP2 citations71

KIMURA SHINGO

1 patent

US8731706B2May 20, 2014

Vacuum processing apparatus

KIMURA SHINGO2 citations50