Inventor

YOON CHANG RO

KR5 patents

⚠️ This page may combine multiple inventors who share the name “YOON CHANG RO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOO GYO-WOOG

1 patent

US8113918B2Feb 14, 2012

Substrate supporting unit and single type substrate polishing apparatus using the same

KOO GYO-WOOG18 citations74

DNS KOREA CO LTD

1 patent

US6784106B2Aug 31, 2004

Wafer drying method

DNS KOREA CO LTD9 citations69

DNS KOREA LTD

1 patent

US6757989B2Jul 6, 2004

Wafer drying apparatus

DNS KOREA LTD7 citations65

KIM YI JUNG

1 patent

US8398812B2Mar 19, 2013

Apparatus and method for treating substrates

KIM YI JUNG5 citations63

SEMES CO LTD

1 patent

US7637272B2Dec 29, 2009

Method and apparatus for cleaning and drying substrates

SEMES CO LTD0 citations39