Inventor
DAVID CAROLE
FR8 patents
Patents
8 patentsUS9425081B2Aug 23, 2016
Method of implantation for fragilization of substrates
SOITEC SILICON ON INSULATOR7 citations77
US9230848B2Jan 5, 2016
Process for fabricating a silicon-on-insulator structure
SOITEC SILICON ON INSULATOR2 citations58
US10134602B2Nov 20, 2018
Process for smoothing the surface of a structure
SOITEC SILICON ON INSULATOR0 citations51
US9875914B2Jan 23, 2018
Process for manufacturing a plurality of structures
SOITEC SILICON ON INSULATOR1 citations45
US9929040B2Mar 27, 2018
Process for fabricating a structure having a buried dielectric layer of uniform thickness
SOITEC SILICON ON INSULATOR0 citations40
US8691662B2Apr 8, 2014
Process for fabricating a silicon-on-insulator structure employing two rapid thermal annealing processes, and related structures
SOITEC SILICON ON INSULATOR0 citations39
US9768057B2Sep 19, 2017
Method for transferring a layer from a single-crystal substrate
SOITEC SILICON ON INSULATOR0 citations35
US9659777B2May 23, 2017
Process for stabilizing a bonding interface, located within a structure which comprises an oxide layer and structure obtained
SOITEC SILICON ON INSULATOR0 citations35