Inventor
TAKIMOTO YOSHIO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “TAKIMOTO YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
13 patentsUS8927201B2Jan 6, 2015
Multilayer resist process pattern-forming method and multilayer resist process inorganic film-forming composition
JSR CORP4 citations72
US10078265B2Sep 18, 2018
Pattern-forming method, resin, and composition
JSR CORP3 citations71
US8871432B2Oct 28, 2014
Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film
JSR CORP4 citations71
US9958781B2May 1, 2018
Method for film formation, and pattern-forming method
JSR CORP2 citations70
US9607849B2Mar 28, 2017
Pattern-forming method and resist underlayer film-forming composition
JSR CORP2 citations70
US11003079B2May 11, 2021
Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound
JSR CORP1 citations60
US10234762B2Mar 19, 2019
Pattern-forming method
JSR CORP1 citations59
US12400740B2Aug 26, 2025
Chemical structure generating device, chemical structure generating program, and chemical structure generating method
JSR CORP0 citations51
US9182671B2Nov 10, 2015
Method for forming pattern, and composition for forming resist underlayer film
JSR CORP1 citations51
US11126084B2Sep 21, 2021
Composition for resist underlayer film formation, resist underlayer film and forming method thereof, production method of patterned substrate, and compound
JSR CORP0 citations50
US10090163B2Oct 2, 2018
Inorganic film-forming composition for multilayer resist processes, and pattern-forming method
JSR CORP1 citations50
US9891526B2Feb 13, 2018
Pattern forming method
JSR CORP0 citations50
US10146131B2Dec 4, 2018
Composition, method for producing patterned substrate, film and forming method thereof, and compound
JSR CORP0 citations37