Inventor
DU FONG-JIE
JP4 patents
Patents
4 patentsUS10458020B2Oct 29, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP3 citations70
US11180853B2Nov 23, 2021
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations59
US12237194B2Feb 25, 2025
Substrate transporter and substrate processing apparatus including substrate transporter
EBARA CORP0 citations49
US11331768B2May 17, 2022
Polishing head and polishing apparatus
EBARA CORP0 citations48