Inventor
UMEZAWA YOSHIHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “UMEZAWA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS11804366B2Oct 31, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US11101114B2Aug 24, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations71
US10192774B2Jan 29, 2019
Temperature control device for processing target object and method of selectively etching nitride film from multilayer film
TOKYO ELECTRON LTD2 citations71
US11935731B2Mar 19, 2024
Plasma processing apparatus, plasma state detection method, and plasma state detection program
TOKYO ELECTRON LTD0 citations51
US12340975B2Jun 24, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11348768B2May 31, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10950467B2Mar 16, 2021
Gas supply mechanism and semiconductor manufacturing system
TOKYO ELECTRON LTD0 citations46
US10685816B2Jun 16, 2020
Method of etching object to be processed
TOKYO ELECTRON LTD0 citations41
US10510514B2Dec 17, 2019
Gas supply mechanism and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations39
US10204766B2Feb 12, 2019
Ion beam irradiation apparatus and substrate processing apparatus
TOKYO ELECTRON LTD0 citations36