Inventor
UDA Mayo
JP6 patents
Patents
6 patentsUS11832373B2Nov 28, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11470712B2Oct 11, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11562889B2Jan 24, 2023
Plasma processing apparatus and gas introducing method
TOKYO ELECTRON LTD1 citations57
US11348768B2May 31, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10950467B2Mar 16, 2021
Gas supply mechanism and semiconductor manufacturing system
TOKYO ELECTRON LTD0 citations46
US10510514B2Dec 17, 2019
Gas supply mechanism and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations39