Inventor
HIRAI YUYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HIRAI YUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSIN ION EQUIPMENT CO LTD
4 patentsUS10600608B1Mar 24, 2020
Ion source
NISSIN ION EQUIPMENT CO LTD3 citations68
US12272588B2Apr 8, 2025
Wafer clamping method and semiconductor manufacturing apparatus
NISSIN ION EQUIPMENT CO LTD0 citations57
US10971339B2Apr 6, 2021
Ion source and cleaning method thereof
NISSIN ION EQUIPMENT CO LTD0 citations57
US12340974B2Jun 24, 2025
Hydrogen supply device, and ion beam irradiation apparatus equipped therewith
NISSIN ION EQUIPMENT CO LTD0 citations53