P

Inventor

PETRAGLIA JENNIFER L

US5 patents
⚠️ This page may combine multiple inventors who share the name “PETRAGLIA JENNIFER L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

3 patents
US9677176B2Jun 13, 2017

Multi-plenum, dual-temperature showerhead

NOVELLUS SYSTEMS INC41 citations92
US10214816B2Feb 26, 2019

PECVD apparatus for in-situ deposition of film stacks

NOVELLUS SYSTEMS INC6 citations81
US12385138B2Aug 12, 2025

Plasma-enhanced deposition of film stacks

NOVELLUS SYSTEMS INC0 citations60

LAM RES CORP

2 patents
US10378107B2Aug 13, 2019

Low volume showerhead with faceplate holes for improved flow uniformity

LAM RES CORP11 citations83
US11072860B2Jul 27, 2021

Fill on demand ampoule refill

LAM RES CORP6 citations82