Inventor
JORAPUR NIKHIL SUDHINDRARAO
US10 patents
Patents
10 patentsUS11956883B2Apr 9, 2024
Methods and apparatus for controlling RF parameters at multiple frequencies
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US11570879B2Jan 31, 2023
Methods and apparatus for controlling RF parameters at multiple frequencies
APPLIED MATERIALS INC3 citations71
US11530482B2Dec 20, 2022
Faceplate having a curved surface
APPLIED MATERIALS INC1 citations70
US11339475B2May 24, 2022
Film stack overlay improvement
APPLIED MATERIALS INC2 citations70
US12110590B2Oct 8, 2024
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US11851759B2Dec 26, 2023
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US11946686B2Apr 2, 2024
Thermally stable flow meters for precision fluid delivery
APPLIED MATERIALS INC0 citations59
US12159785B2Dec 3, 2024
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11798803B2Oct 24, 2023
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11145504B2Oct 12, 2021
Method of forming film stacks with reduced defects
APPLIED MATERIALS INC0 citations45