Inventor

STEVENS E HENRY

US19 patents

⚠️ This page may combine multiple inventors who share the name “STEVENS E HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEVENS E HENRY

SEMITOOL INC

Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device

Process and manufacturing tool architecture for use in the manufacturing of one or more protected metallization structures on a workpiece

Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece

Process and manufacturing tool architecture for use in the manufacture of one or more metallization levels on an integrated circuit

Process for etching thin-film layers of a workpiece used to form microelectronic circuits or components

Process for etching thin-film layers of a workpiece used to form microelectric circuits or components

Process and manufacturing tool architecture for use in the manufacture of one or more protected metallization structures on a workpiece

Method for low temperature annealing of metallization micro-structures in the production of a microelectronic device

Method and apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device

Method and apparatus for low temperature annealing of metallization micro-structure in the production of a microelectronic device

QUALITY MICROCIRCUITS CORP

Method of forming capacitors and interconnect lines

Capacitors and interconnect lines for use with integrated circuits

Process for contacting and interconnecting semiconductor devices within an integrated circuit

Apparatus for application of chemical process to a workpiece

RAMTRON INT CORP

Process for fabricating transistors using composite nitride structure

Sealed self aligned contact process

INMOS CORP

Semiconductor contact silicide/nitride process with control for silicide thickness

RAMTRON CORP

Reaction barrier for a multilayer structure in an integrated circuit

STEVENS E HENRY

Structure and process for contacting and interconnecting semiconductor devices within an integrated circuit