Inventor
LIU HAO-CHIEH
TW10 patents
⚠️ This page may combine multiple inventors who share the name “LIU HAO-CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
8 patentsUS6037216AMar 14, 2000
Method for simultaneously fabricating capacitor structures, for giga-bit DRAM cells, and peripheral interconnect structures, using a dual damascene process
VANGUARD INT SEMICONDUCT CORP95 citations97
US6265296B1Jul 24, 2001
Method for forming self-aligned contacts using a hard mask
VANGUARD INT SEMICONDUCT CORP22 citations92
US6080662AJun 27, 2000
Method for forming multi-level contacts using a H-containing fluorocarbon chemistry
VANGUARD INT SEMICONDUCT CORP20 citations92
US5972789AOct 26, 1999
Method for fabricating reduced contacts using retardation layers
VANGUARD INT SEMICONDUCT CORP19 citations92
US5906948AMay 25, 1999
Method for etching high aspect-ratio multilevel contacts
VANGUARD INT SEMICONDUCT CORP29 citations92
US6565759B1May 20, 2003
Etching process
VANGUARD INT SEMICONDUCT CORP16 citations83
US6103588AAug 15, 2000
Method of forming a contact hole in a semiconductor device
VANGUARD INT SEMICONDUCT CORP17 citations83
US6074952AJun 13, 2000
Method for forming multi-level contacts
VANGUARD INT SEMICONDUCT CORP13 citations73