Inventor
YANG KYOUNG-MO
KR5 patents
⚠️ This page may combine multiple inventors who share the name “YANG KYOUNG-MO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS6517412B2Feb 11, 2003
Method of controlling wafer polishing time using sample-skip algorithm and wafer polishing using the same
SAMSUNG ELECTRONICS CO LTD40 citations92
US5953579ASep 14, 1999
In-line test of contact opening of semiconductor device
SAMSUNG ELECTRONICS CO LTD11 citations71
US6048743AApr 11, 2000
Using a submicron level dimension reference
SAMSUNG ELECTRONICS CO LTD3 citations61