Inventor
NAKAMURA KYOJI
JP8 patents
Patents
8 patentsUS6597430B1Jul 22, 2003
Exposure method, illuminating device, and exposure system
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US5484026AJan 16, 1996
Handheld electromotive tool with sensor
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US6727981B2Apr 27, 2004
Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method
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US6961114B2Nov 1, 2005
Optical apparatus and exposure apparatus incorporating the apparatus
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US5365801ANov 22, 1994
Coarse/fine adjustment of a rotary body
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US5400515AMar 28, 1995
Water-proof structure for measuring apparatus
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US7889320B2Feb 15, 2011
Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
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US7968330B2Jun 28, 2011
Culture observation equipment
NIKON CORP0 citations51