Inventor
IIZUKA KATSUHIKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “IIZUKA KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS5472564ADec 5, 1995
Method of dry etching with hydrogen bromide or bromide
FUJITSU LTD60 citations94
US5316616AMay 31, 1994
Dry etching with hydrogen bromide or bromine
FUJITSU LTD49 citations94
US5487811AJan 30, 1996
Process for preparation of semiconductor device
FUJITSU LTD27 citations90
US5756401AMay 26, 1998
Process for the etching of polycide film
FUJITSU LTD13 citations71