Inventor

THIRUMALA VANI

US3 patents

Patents

3 patents

US7087104B2Aug 8, 2006

Preparation of electroless deposition solutions

INTEL CORP16 citations82

US7622305B2Nov 24, 2009

Multiple acid solution characterization

INTEL CORP2 citations59

US7412872B2Aug 19, 2008

Process for screening outgas emissions in semiconductor processing

INTEL CORP2 citations58