Inventor

OSANAI MASANAO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “OSANAI MASANAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US7795143B2Sep 14, 2010

Substrate processing apparatus and manufacturing method of semiconductor device

HITACHI INT ELECTRIC INC6 citations71

US8367530B2Feb 5, 2013

Substrate processing apparatus and manufacturing method of semiconductor device

HITACHI INT ELECTRIC INC0 citations49

KOKUSAI ELECTRIC CORP

1 patent

US12563981B2Feb 24, 2026

Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP0 citations41