Inventor

RADHAKRISHNAN CHANDER

US3 patents

Patents

3 patents

US9824865B2Nov 21, 2017

Waferless clean in dielectric etch process

LAM RES CORP2 citations69

US10147587B2Dec 4, 2018

Waferless clean in dielectric etch process

LAM RES CORP0 citations48

US12444588B2Oct 14, 2025

Method and apparatus for processing wafers

LAM RES CORP0 citations41