P

Inventor

SATO TETSUJI

JP27 patents
⚠️ This page may combine multiple inventors who share the name “SATO TETSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

10 patents
US7815767B2Oct 19, 2010

Plasma processing apparatus

TOKYO ELECTRON LTD8 citations84
US7927066B2Apr 19, 2011

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

TOKYO ELECTRON LTD8 citations82
US7837432B2Nov 23, 2010

Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus

TOKYO ELECTRON LTD5 citations74
US11032899B2Jun 8, 2021

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD4 citations71
US11257662B2Feb 22, 2022

Annular member, plasma processing apparatus and plasma etching method

TOKYO ELECTRON LTD0 citations61
US11825589B2Nov 21, 2023

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations60
US12340985B2Jun 24, 2025

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations52
US11961718B2Apr 16, 2024

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations48
US12531213B2Jan 20, 2026

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations44
US10847348B2Nov 24, 2020

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations37

SATO TETSUJI

3 patents
US8083891B2Dec 27, 2011

Plasma processing apparatus and the upper electrode unit

SATO TETSUJI14 citations82
US8687343B2Apr 1, 2014

Substrate mounting table of substrate processing apparatus

SATO TETSUJI0 citations39
US8077761B2Dec 13, 2011

Data transmission and reception module, and method of adjusting reception threshold value thereof

SATO TETSUJI0 citations39

YOSHIMURA AKIHIRO

2 patents
USD709536SJul 22, 2014

Focusing ring

YOSHIMURA AKIHIRO455 citations96
US9455125B2Sep 27, 2016

Substrate processing apparatus

YOSHIMURA AKIHIRO3 citations70

FUJITSU LTD

2 patents
US5808571ASep 15, 1998

Synchronization control unit which maintains synchronization between serial-to-parallel converters operating in parallel, or between parallel-to-serial converters operating in parallel

FUJITSU LTD35 citations92
US7382987B2Jun 3, 2008

Identification level control method and optical receiver

FUJITSU LTD10 citations84

PATENT ISLAND CO LTD

2 patents
USD495008SAug 24, 2004

India ink container

PATENT ISLAND CO LTD1 citations49
USD493489SJul 27, 2004

India ink container

PATENT ISLAND CO LTD1 citations49

SHINETSU CHEMICAL CO

1 patent
US7438783B2Oct 21, 2008

Plasma processing apparatus and plasma processing method

SHINETSU CHEMICAL CO40 citations92

HONDA MOTOR CO LTD

1 patent
US7707924B2May 4, 2010

Linear actuator

HONDA MOTOR CO LTD8 citations79

SUMITOMO PRECISION PROD CO

1 patent
US7513112B2Apr 7, 2009

Reservoir built-in type actuator

SUMITOMO PRECISION PROD CO9 citations76

HOCHIKI CO

1 patent
US4914425AApr 3, 1990

Highly sensitive smoke detector

HOCHIKI CO10 citations72

TOYOTA TECHNO SERVICE CORP

1 patent
US5767396AJun 16, 1998

Method and device for measuring fuel injection timing

TOYOTA TECHNO SERVICE CORP8 citations63

HONDA MASANOBU

1 patent
US8173036B2May 8, 2012

Plasma processing method and apparatus

HONDA MASANOBU5 citations62

MORIYA TSUYOSHI

1 patent
US8727708B2May 20, 2014

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

MORIYA TSUYOSHI1 citations60

MIYAGAWA MASAAKI

1 patent
US8524005B2Sep 3, 2013

Heat-transfer structure and substrate processing apparatus

MIYAGAWA MASAAKI4 citations59