Inventor
OSHIMA YOSHIMASA
JP32 patents
⚠️ This page may combine multiple inventors who share the name “OSHIMA YOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
12 patentsUS7333192B2Feb 19, 2008
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP37 citations96
US8035808B2Oct 11, 2011
Surface defect inspection method and apparatus
HITACHI HIGH TECH CORP14 citations92
US7710557B2May 4, 2010
Surface defect inspection method and apparatus
HITACHI HIGH TECH CORP24 citations92
US7869024B2Jan 11, 2011
Method and its apparatus for inspecting defects
HITACHI HIGH TECH CORP11 citations84
US7768635B2Aug 3, 2010
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP10 citations84
US7719673B2May 18, 2010
Defect inspecting device for sample surface and defect detection method therefor
HITACHI HIGH TECH CORP10 citations84
US7675613B2Mar 9, 2010
Defect inspection method
HITACHI HIGH TECH CORP9 citations84
US7916288B2Mar 29, 2011
Defect inspection method
HITACHI HIGH TECH CORP4 citations74
US7973920B2Jul 5, 2011
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP3 citations63
US7970199B2Jun 28, 2011
Method and apparatus for detecting defect on a surface of a specimen
HITACHI HIGH TECH CORP5 citations63
US7965386B2Jun 21, 2011
Method and its apparatus for inspecting defects
HITACHI HIGH TECH CORP2 citations63
US9506872B2Nov 29, 2016
Inspection apparatus
HITACHI HIGH TECH CORP0 citations52
HITACHI LTD
7 patentsUS4614427ASep 30, 1986
Automatic contaminants detection apparatus
HITACHI LTD141 citations96
US4115762ASep 19, 1978
Alignment pattern detecting apparatus
HITACHI LTD90 citations96
US5046847ASep 10, 1991
Method for detecting foreign matter and device for realizing same
HITACHI LTD100 citations94
US4508453AApr 2, 1985
Pattern detection system
HITACHI LTD48 citations92
US4423331ADec 27, 1983
Method and apparatus for inspecting specimen surface
HITACHI LTD52 citations92
US4362389ADec 7, 1982
Method and apparatus for projection type mask alignment
HITACHI LTD29 citations90
US4242702ADec 30, 1980
Apparatus for automatically checking external appearance of object
HITACHI LTD21 citations82
OSHIMA YOSHIMASA
5 patentsUS8264679B2Sep 11, 2012
Inspection apparatus
OSHIMA YOSHIMASA2 citations61
US8120766B2Feb 21, 2012
Inspection apparatus
OSHIMA YOSHIMASA1 citations61
US8934092B2Jan 13, 2015
Surface defect inspection method and apparatus
OSHIMA YOSHIMASA0 citations51
US8705026B2Apr 22, 2014
Inspection apparatus
OSHIMA YOSHIMASA0 citations51
US8400629B2Mar 19, 2013
Surface defect inspection method and apparatus
OSHIMA YOSHIMASA0 citations51
HAMAMATSU AKIRA
3 patentsUS8144337B2Mar 27, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA15 citations92
US8310665B2Nov 13, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA9 citations84
US8654350B2Feb 18, 2014
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA2 citations62