Inventor
URANO YUTA
JP80 patents
⚠️ This page may combine multiple inventors who share the name “URANO YUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
28 patentsUS7465935B2Dec 16, 2008
Method for inspecting pattern defect and device for realizing the same
HITACHI HIGH TECH CORP45 citations96
US7333192B2Feb 19, 2008
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP37 citations96
US7664608B2Feb 16, 2010
Defect inspection method and apparatus
HITACHI HIGH TECH CORP37 citations93
US7528942B2May 5, 2009
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP32 citations93
US7777876B2Aug 17, 2010
Inspection method and inspection device
HITACHI HIGH TECH CORP27 citations90
US7869024B2Jan 11, 2011
Method and its apparatus for inspecting defects
HITACHI HIGH TECH CORP11 citations84
US7859656B2Dec 28, 2010
Defect inspection method and system
HITACHI HIGH TECH CORP15 citations84
US7768635B2Aug 3, 2010
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP10 citations84
US7675613B2Mar 9, 2010
Defect inspection method
HITACHI HIGH TECH CORP9 citations84
US7492452B2Feb 17, 2009
Defect inspection method and system
HITACHI HIGH TECH CORP13 citations84
US7916288B2Mar 29, 2011
Defect inspection method
HITACHI HIGH TECH CORP4 citations74
US10830706B2Nov 10, 2020
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US10401300B2Sep 3, 2019
Defect observation method and device and defect detection device
HITACHI HIGH TECH CORP4 citations73
US10254235B2Apr 9, 2019
Defect inspecting method and defect inspecting apparatus
HITACHI HIGH TECH CORP1 citations73
US10228332B2Mar 12, 2019
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9678021B2Jun 13, 2017
Method and apparatus for inspecting defects
HITACHI HIGH TECH CORP4 citations73
US9645094B2May 9, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9568439B2Feb 14, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP3 citations73
US9523648B2Dec 20, 2016
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP3 citations73
US9506876B2Nov 29, 2016
X-ray inspection device, inspection method, and X-ray detector
HITACHI HIGH TECH CORP4 citations73
US9329137B2May 3, 2016
Defect inspection method and device using same
HITACHI HIGH TECH CORP4 citations73
US9310318B2Apr 12, 2016
Defect inspection method and defect inspection device
HITACHI HIGH TECH CORP3 citations73
US9733194B2Aug 15, 2017
Method for reviewing a defect and apparatus
HITACHI HIGH TECH CORP2 citations72
US8755041B2Jun 17, 2014
Defect inspection method and apparatus
HITACHI HIGH TECH CORP3 citations63
US7973920B2Jul 5, 2011
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP3 citations63
US7965386B2Jun 21, 2011
Method and its apparatus for inspecting defects
HITACHI HIGH TECH CORP2 citations63
US7751037B2Jul 6, 2010
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP3 citations63
US11143598B2Oct 12, 2021
Defect inspection apparatus and defect inspection method
HITACHI HIGH TECH CORP0 citations62
URANO YUTA
8 patentsUS8922764B2Dec 30, 2014
Defect inspection method and defect inspection apparatus
URANO YUTA12 citations84
US8274652B2Sep 25, 2012
Defect inspection system and method of the same
URANO YUTA11 citations84
US9588054B2Mar 7, 2017
Defect inspection method, low light detecting method and low light detector
URANO YUTA2 citations73
US8804110B2Aug 12, 2014
Fault inspection device and fault inspection method
URANO YUTA4 citations73
US8599369B2Dec 3, 2013
Defect inspection device and inspection method
URANO YUTA6 citations73
US8314929B2Nov 20, 2012
Method and its apparatus for inspecting defects
URANO YUTA5 citations73
US8427634B2Apr 23, 2013
Defect inspection method and apparatus
URANO YUTA3 citations63
US8477302B2Jul 2, 2013
Defect inspection apparatus
URANO YUTA4 citations62
HAMAMATSU AKIRA
3 patentsUS8144337B2Mar 27, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA15 citations92
US8310665B2Nov 13, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA9 citations84
US8654350B2Feb 18, 2014
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA2 citations62
NAKAO TOSHIYUKI
3 patentsNAKANO HIROYUKI
2 patentsCANON KK
1 patentHORAI IZUO
1 patentHITACHI HIGH TECH SCIENCE CORP
1 patentOTANI YUKO
1 patentMARUYAMA SHIGENOBU
1 patentHONDA TOSHIFUMI
1 patentShowing the top 50 of 80 patents by PatentIndex Score.