Inventor
TSAI HSIULIN
TW3 patents
Patents
3 patentsUS11557476B2Jan 17, 2023
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations58
US11211265B2Dec 28, 2021
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD0 citations48
US10854449B2Dec 1, 2020
Method and apparatus for forming silicon film
TOKYO ELECTRON LTD0 citations37