Inventor
Bravo Andrew Stratton
US4 patents
Patents
4 patentsUS9601319B1Mar 21, 2017
Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process
LAM RES CORP104 citations94
US10622189B2Apr 14, 2020
Adjustable side gas plenum for edge rate control in a downstream reactor
LAM RES CORP27 citations92
US12347650B2Jul 1, 2025
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US11967486B2Apr 23, 2024
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59