Inventor
KYONO IWAO
3 patents
Patents
3 patentsUS4770948ASep 13, 1988
High-purity metal and metal silicide target for LSI electrodes
NIPPON MINING CO43 citations92
US4619695AOct 28, 1986
Process for producing high-purity metal targets for LSI electrodes
NIPPON MINING CO63 citations92
US3961031AJun 1, 1976
Method for removal of mercury in sulfur dioxide-containing gas
NIPPON MINING CO24 citations77