Inventor
NAKAGAWA YOSHIHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NAKAGAWA YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAKAGAWA YOSHIHIKO
3 patentsUS8271119B2Sep 18, 2012
Substrate processing apparatus and substrate processing system
NAKAGAWA YOSHIHIKO7 citations79
US8712568B2Apr 29, 2014
Substrate processing apparatus and display method of substrate processing apparatus
NAKAGAWA YOSHIHIKO3 citations58
US8768502B2Jul 1, 2014
Substrate processing apparatus and substrate processing system
NAKAGAWA YOSHIHIKO1 citations48