Inventor

YANG CHUNG-RU

TW5 patents

⚠️ This page may combine multiple inventors who share the name “YANG CHUNG-RU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US7838887B2Nov 23, 2010

Source/drain carbon implant and RTA anneal, pre-SiGe deposition

TAIWAN SEMICONDUCTOR MFG26 citations91

WOON WEI-YEN

1 patent

US8404546B2Mar 26, 2013

Source/drain carbon implant and RTA anneal, pre-SiGe deposition

WOON WEI-YEN35 citations90

KU SHAO-YEN

1 patent

US8105851B1Jan 31, 2012

Nitride film wet stripping

KU SHAO-YEN19 citations90

LIN CHIN-MING

1 patent

US8232114B2Jul 31, 2012

RTP spike annealing for semiconductor substrate dopant activation

LIN CHIN-MING5 citations60

YANG CHUNG-RU

1 patent

US8188447B2May 29, 2012

Field-by-field laser annealing and feed forward process control

YANG CHUNG-RU3 citations55