Inventor
HUANG SOON KANG
TW17 patents
⚠️ This page may combine multiple inventors who share the name “HUANG SOON KANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS10357867B2Jul 23, 2019
Polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US11605566B2Mar 14, 2023
Method and structure for metal gates
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9718164B2Aug 1, 2017
Polishing system and polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10513006B2Dec 24, 2019
High throughput CMP platform
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations71
US10096482B2Oct 9, 2018
Apparatus and method for chemical mechanical polishing process control
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US10090207B2Oct 2, 2018
Multi-point chemical mechanical polishing end point detection system and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11358252B2Jun 14, 2022
Method of using a polishing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12100627B2Sep 24, 2024
Method and structure for metal gates
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12020980B2Jun 25, 2024
Semiconductor structure and forming method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US10668592B2Jun 2, 2020
Method of planarizing a wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6821895B2Nov 23, 2004
Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP
TAIWAN SEMICONDUCTOR MFG15 citations83
US7141495B2Nov 28, 2006
Methods and forming structures, structures and apparatuses for forming structures
TAIWAN SEMICONDUCTOR MFG3 citations61
US7957118B2Jun 7, 2011
Multi-zone electrostatic chuck and chucking method
TAIWAN SEMICONDUCTOR MFG4 citations53
US7950983B2May 31, 2011
Retainer ring
TAIWAN SEMICONDUCTOR MFG0 citations52
US7666068B2Feb 23, 2010
Retainer ring
TAIWAN SEMICONDUCTOR MFG0 citations52
US9368452B2Jun 14, 2016
Metal conductor chemical mechanical polish
TAIWAN SEMICONDUCTOR MFG0 citations51