Inventor

BOURGET LAWRENCE

US3 patents

⚠️ This page may combine multiple inventors who share the name “BOURGET LAWRENCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED SCIENCE & TECH INC

2 patents

US5688382ANov 18, 1997

Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate

APPLIED SCIENCE & TECH INC68 citations94

US5279866AJan 18, 1994

Process for depositing wear-resistant coatings

APPLIED SCIENCE & TECH INC25 citations89

INTEL CORP

1 patent

US5792522AAug 11, 1998

High density plasma physical vapor deposition

INTEL CORP65 citations94