Inventor
POST RICHARD S
US4 patents
Patents
4 patentsUS5688382ANov 18, 1997
Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate
APPLIED SCIENCE & TECH INC68 citations94
US5518759AMay 21, 1996
High growth rate plasma diamond deposition process and method of controlling same
APPLIED SCIENCE & TECH INC21 citations89
US5405645AApr 11, 1995
High growth rate plasma diamond deposition process and method of controlling same
APPLIED SCIENCE & TECH INC27 citations89
US5279866AJan 18, 1994
Process for depositing wear-resistant coatings
APPLIED SCIENCE & TECH INC25 citations89