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Inventor
AOKI SHOJI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “AOKI SHOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
1 patent
US6178975B1
Jan 30, 2001
Waste water classifying recovery apparatus in wafer cleaning system
SHINETSU HANDOTAI KK
23 citations
87
AOKI SHOJI
1 patent
US9028658B2
May 12, 2015
Mn-containing copper alloy sputtering target generating few particles
AOKI SHOJI
5 citations
65
JAPAN FINE CERAMICS CT
1 patent
US6660665B2
Dec 9, 2003
Platen for electrostatic wafer clamping apparatus
JAPAN FINE CERAMICS CT
3 citations
60
KOMATSU MFG CO LTD
1 patent
US12073977B2
Aug 27, 2024
Method for manufacturing reactor, and reactor
KOMATSU MFG CO LTD
0 citations
47