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Inventor
TRATTLES MATTHEW R
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TRATTLES MATTHEW R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
2 patents
US7198546B2
Apr 3, 2007
Method to monitor pad wear in CMP processing
LSI LOGIC CORP
10 citations
80
US6635116B1
Oct 21, 2003
Residual oxygen reduction system
LSI LOGIC CORP
5 citations
55
LSI CORP
1 patent
US7442113B2
Oct 28, 2008
Visual wear confirmation polishing pad
LSI CORP
4 citations
60