Inventor
TERKEN MARTINUS ARNOLDUS HENRI
NL4 patents
Patents
4 patentsUS7184121B2Feb 27, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV10 citations82
US7012264B2Mar 14, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations67
US7230254B2Jun 12, 2007
Movable carriage for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7034924B2Apr 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations33