Inventor

HENRY RICHARD O

US9 patents

⚠️ This page may combine multiple inventors who share the name “HENRY RICHARD O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

5 patents

US7563670B2Jul 21, 2009

Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same

IBM14 citations83

US7407605B2Aug 5, 2008

SAMSUNG ELECTRONICS CO LTD

1 patent

US7902082B2Mar 8, 2011

Method of forming field effect transistors using diluted hydrofluoric acid to remove sacrificial nitride spacers

SAMSUNG ELECTRONICS CO LTD5 citations60

CHARTERED SEMICONDUCTOR MFG

1 patent

US7955936B2Jun 7, 2011

Semiconductor fabrication process including an SiGe rework method

CHARTERED SEMICONDUCTOR MFG1 citations50

FITZSIMMONS JOHN A

1 patent

US8337627B2Dec 25, 2012

Cleaning exhaust screens in a manufacturing process

FITZSIMMONS JOHN A0 citations49

HENRY RICHARD O

1 patent

US8992691B2Mar 31, 2015

Partial solution replacement in recyclable persulfuric acid cleaning systems

HENRY RICHARD O1 citations40

HENRY RICHARD O

IBM

Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by same

Manufacturable CoWP metal cap process for copper interconnects

Manufacturable CoWP metal cap process for copper interconnects

Bottle-shaped trench capacitor with enhanced capacitance

Partial solution replacement in recyclable persulfuric acid cleaning systems

SAMSUNG ELECTRONICS CO LTD

Method of forming field effect transistors using diluted hydrofluoric acid to remove sacrificial nitride spacers

CHARTERED SEMICONDUCTOR MFG

Semiconductor fabrication process including an SiGe rework method

FITZSIMMONS JOHN A

Cleaning exhaust screens in a manufacturing process

HENRY RICHARD O

Partial solution replacement in recyclable persulfuric acid cleaning systems