Inventor

YOSHIDA TATSUHEI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YOSHIDA TATSUHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUOKA NOBUAKI

1 patent

US8985880B2Mar 24, 2015

Coating and developing apparatus and method

MATSUOKA NOBUAKI9 citations82

TOKYO ELECTRON LTD

1 patent

US9417529B2Aug 16, 2016

Coating and developing apparatus and method

TOKYO ELECTRON LTD4 citations72

HAYAKAWA MAKOTO

1 patent

US9026240B2May 5, 2015

Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage medium

HAYAKAWA MAKOTO0 citations37