Inventor

CHEN ZHIGANG

US101 patents

⚠️ This page may combine multiple inventors who share the name “CHEN ZHIGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN ZHIGANG

LAM RES CORP

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Ion energy control by RF pulse shape

Systems and methods for tailoring ion energy distribution function by odd harmonic mixing

Electronic knob for tuning radial etch non-uniformity at VHF frequencies

Control of etch rate using modeling, feedback and impedance match

Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators

Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Systems and methods for tailoring ion energy distribution function by odd harmonic mixing

Multi regime plasma wafer processing to increase directionality of ions

Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity

Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring

Ion energy control by RF pulse shape

Control of etch rate using modeling, feedback and impedance match

Multi regime plasma wafer processing to increase directionality of ions

APPLIED MATERIALS INC

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Symmetric plasma process chamber

Inductively coupled plasma source with phase control

Symmetric VHF source for a plasma reactor

Symmetric VHF source for a plasma reactor

Symmetric plasma process chamber

Symmetric VHF source for a plasma reactor

Symmetric plasma process chamber

Plasma processing apparatus and liner assembly for tuning electrical skews

NLIGHT INC

High brightness multijunction diode stacking

Diode laser apparatus with FAC lens out-of-plane beam steering

Power and brightness scaling in fiber coupled diode lasers using diodes with optimized beam dimensions

High brightness coherent multi-junction diode lasers

CHEN ZHIGANG

Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber

RF power delivery system in a semiconductor apparatus

Plant oil-based UV-curable coating

ENANTA PHARM INC

Acylaminoheteroaryl hepatitis C virus protease inhibitors

11,12-lactone bicyclolides

Hepatitis C virus inhibitors

ADHEREX TECHNOLOGIES INC

Peptidomimetic modulators of cell adhesion

Peptidomimetic modulators of cell adhesion

WEBSTER DEAN C

Highly functional epoxidized resins and coatings

Polyol photosensitizers, carrier gas UV laser ablation sensitizers, and other additives and methods for making and using same

UNIV ILLINOIS

Robust, reliable compression and packetization scheme for transmitting video

TOKYO ELECTRON LTD

Optical metrology using a photonic nanojet

FENG LEI

Methods for selecting and controlling devices

TWITTER INC

In-message applications in a messaging platform

COLLINS KENNETH S

Symmetric VHF plasma power coupler with active uniformity steering

RAMASWAMY KARTIK

Symmetric VHF source for a plasma reactor

RUST OLEUM CORP

Seed oil based reactive diluent

NDSU RES FOUNDATION

Selective laser-assisted transfer of discrete components