Inventor
WILBY ROBERT JOHN
GB13 patents
⚠️ This page may combine multiple inventors who share the name “WILBY ROBERT JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
METRYX LTD
8 patentsUS7340372B2Mar 4, 2008
Apparatus and method for investigating parameters of layers deposited on semiconductor wafers
METRYX LTD22 citations91
US7020577B2Mar 28, 2006
Apparatus and method for investigating semiconductors wafer
METRYX LTD31 citations91
US9818658B2Nov 14, 2017
Semiconductor wafer processing methods and apparatus
METRYX LTD7 citations83
US8357548B2Jan 22, 2013
Semiconductor wafer metrology apparatus and method
METRYX LTD11 citations83
US7892863B2Feb 22, 2011
Measuring apparatus
METRYX LTD11 citations83
US9228886B2Jan 5, 2016
Semiconductor wafer weight metrology apparatus
METRYX LTD4 citations72
US9903750B2Feb 27, 2018
Method and device for determining information relating to the mass of a semiconductor wafer
METRYX LTD1 citations51
US9310244B2Apr 12, 2016
Semiconductor wafer metrology apparatus and method
METRYX LTD0 citations51
WILBY ROBERT JOHN
4 patentsUS8683880B2Apr 1, 2014
Semiconductor wafer metrology apparatus and method
WILBY ROBERT JOHN7 citations82
US8200447B2Jun 12, 2012
Measuring apparatus
WILBY ROBERT JOHN7 citations82
US9349624B2May 24, 2016
Semiconductor wafer monitoring apparatus and method
WILBY ROBERT JOHN4 citations71
US8200353B2Jun 12, 2012
Measuring apparatus
WILBY ROBERT JOHN6 citations71