Inventor

HILL SHANNON B

US2 patents

⚠️ This page may combine multiple inventors who share the name “HILL SHANNON B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

US SEC COMMERCE THE NAT INST O

1 patent

US7709807B2May 4, 2010

Magneto-optical trap ion source

US SEC COMMERCE THE NAT INST O16 citations76

KLA TENCOR CORP

1 patent

US11268911B2Mar 8, 2022

Boron-based capping layers for EUV optics

KLA TENCOR CORP2 citations68