Inventor
CHENG SHIRAN
CN9 patents
Patents
9 patentsUS12518943B2Jan 6, 2026
Ion source baffle, ion etching machine, and usage method therefor
JIANGSU LEUVEN INSTR CO LTD0 citations58
US12531215B2Jan 20, 2026
Plasma processing system and multi-section faraday shielding device thereof
JIANGSU LEUVEN INSTR CO LTD0 citations50
US12494346B2Dec 9, 2025
Ceramic air inlet radio frequency connection type cleaning device
JIANGSU LEUVEN INSTR CO LTD0 citations50
US12243713B2Mar 4, 2025
Anti-breakdown ion source discharge apparatus
JIANGSU LEUVEN INSTR CO LTD0 citations50
US12009188B2Jun 11, 2024
Rotatable faraday cleaning apparatus and plasma processing system
JIANGSU LEUVEN INSTR CO LTD0 citations50
US11955323B2Apr 9, 2024
Device for blocking plasma backflow in process chamber to protect air inlet structure
JIANGSU LEUVEN INSTR CO LTD0 citations50
US11837439B2Dec 5, 2023
Inductively coupled plasma treatment system
JIANGSU LEUVEN INSTR CO LTD0 citations50
US11735400B2Aug 22, 2023
Faraday cleaning device and plasma processing system
JIANGSU LEUVEN INSTR CO LTD0 citations50
US12112923B2Oct 8, 2024
Reaction chamber lining
JIANGSU LEUVEN INSTR CO LTD0 citations45