Inventor
UNRATH MARK A
US19 patents
⚠️ This page may combine multiple inventors who share the name “UNRATH MARK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELECTRO SCIENT IND INC
12 patentsUS5751585AMay 12, 1998
High speed, high accuracy multi-stage tool positioning system
ELECTRO SCIENT IND INC284 citations98
US5847960ADec 8, 1998
Multi-tool positioning system
ELECTRO SCIENT IND INC193 citations97
US6706999B1Mar 16, 2004
Laser beam tertiary positioner apparatus and method
ELECTRO SCIENT IND INC108 citations95
US7259354B2Aug 21, 2007
Methods for processing holes by moving precisely timed laser pulses in circular and spiral trajectories
ELECTRO SCIENT IND INC40 citations90
US8026158B2Sep 27, 2011
Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window
ELECTRO SCIENT IND INC14 citations83
US7982160B2Jul 19, 2011
Photonic clock stabilized laser comb processing
ELECTRO SCIENT IND INC8 citations82
US9486877B2Nov 8, 2016
Laser pulse energy control systems and methods
ELECTRO SCIENT IND INC4 citations73
US10391585B2Aug 27, 2019
Acousto-optic deflector applications in laser processing of dielectric or other materials
ELECTRO SCIENT IND INC2 citations70
US11738405B2Aug 29, 2023
Acousto-optic deflector applications in laser processing of dielectric or other materials
ELECTRO SCIENT IND INC0 citations60
US9931713B2Apr 3, 2018
Laser systems and methods for AOD rout processing
ELECTRO SCIENT IND INC1 citations52
US8358671B2Jan 22, 2013
Photonic clock stabilized laser comb processing
ELECTRO SCIENT IND INC1 citations50
US9724782B2Aug 8, 2017
Laser systems and methods for AOD tool settling for AOD travel reduction
ELECTRO SCIENT IND INC0 citations41
UNRATH MARK A
6 patentsUS8288679B2Oct 16, 2012
Laser processing systems using through-the-lens alignment of a laser beam with a target feature
UNRATH MARK A52 citations97
US8404998B2Mar 26, 2013
Acousto-optic deflector applications in laser processing of dielectric or other materials
UNRATH MARK A46 citations95
US8847113B2Sep 30, 2014
Laser processing systems and methods for beam dithering and skiving
UNRATH MARK A23 citations83
US8680430B2Mar 25, 2014
Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features
UNRATH MARK A19 citations83
US8642918B2Feb 4, 2014
Adaptive optic beamshaping in laser processing systems
UNRATH MARK A9 citations82
US8198564B2Jun 12, 2012
Adaptive optic beamshaping in laser processing systems
UNRATH MARK A11 citations82