Inventor
SASAZAWA HIDEAKI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “SASAZAWA HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS7449689B2Nov 11, 2008
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method
HITACHI HIGH TECH CORP23 citations92
US7816062B2Oct 19, 2010
Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern
HITACHI HIGH TECH CORP17 citations84
US8359661B2Jan 22, 2013
Magnetic device inspection apparatus and magnetic device inspection method
HITACHI HIGH TECH CORP10 citations83
US7969567B2Jun 28, 2011
Method and device for detecting shape of surface of medium
HITACHI HIGH TECH CORP18 citations83
US7898652B2Mar 1, 2011
Method and apparatus for detecting defects on a disk surface
HITACHI HIGH TECH CORP4 citations61
US8040772B2Oct 18, 2011
Method and apparatus for inspecting a pattern shape
HITACHI HIGH TECH CORP1 citations52
US10352879B2Jul 16, 2019
X-ray inspection method and device
HITACHI HIGH TECH CORP0 citations41
HITACHI LTD
5 patentsUS5780866AJul 14, 1998
Method and apparatus for automatic focusing and a method and apparatus for three dimensional profile detection
HITACHI LTD62 citations95
US7084990B2Aug 1, 2006
Method and its apparatus for measuring size and shape of fine patterns
HITACHI LTD13 citations80
US6631547B2Oct 14, 2003
Manufacturing method for thin film magnetic heads
HITACHI LTD3 citations62
US7355143B1Apr 8, 2008
Circuit board production method and its apparatus
HITACHI LTD6 citations60
US6831277B1Dec 14, 2004
Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor
HITACHI LTD5 citations60
SASAZAWA HIDEAKI
3 patentsUS8547545B2Oct 1, 2013
Method and apparatus for inspecting a surface of a substrate
SASAZAWA HIDEAKI25 citations86
US8638430B2Jan 28, 2014
Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium
SASAZAWA HIDEAKI2 citations60
US8411928B2Apr 2, 2013
Scatterometry method and device for inspecting patterned medium
SASAZAWA HIDEAKI2 citations60