Inventor
HIROSE TAKENORI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “HIROSE TAKENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6753972B1Jun 22, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD87 citations98
US7119908B2Oct 10, 2006
Method and apparatus for measuring thickness of thin film and device manufacturing method using same
HITACHI LTD62 citations96
US7020306B2Mar 28, 2006
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device
HITACHI LTD35 citations92
US7057744B2Jun 6, 2006
Method and apparatus for measuring thickness of thin film and device manufacturing method using same
HITACHI LTD13 citations84
US6987874B2Jan 17, 2006
Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same
HITACHI LTD10 citations74
US6897079B2May 24, 2005
Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same
HITACHI LTD11 citations74
US6806970B2Oct 19, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD12 citations74
US6794206B2Sep 21, 2004
Method of polishing a film
HITACHI LTD5 citations63
HITACHI HIGH TECH CORP
8 patentsUS7969567B2Jun 28, 2011
Method and device for detecting shape of surface of medium
HITACHI HIGH TECH CORP18 citations83
US12436097B2Oct 7, 2025
Spectroscopic measurement device
HITACHI HIGH TECH CORP0 citations62
US8040772B2Oct 18, 2011
Method and apparatus for inspecting a pattern shape
HITACHI HIGH TECH CORP1 citations52
US12292330B2May 6, 2025
Spectrometry apparatus
HITACHI HIGH TECH CORP0 citations51
US11733264B2Aug 22, 2023
Cantilever, scanning probe microscope, and measurement method using scanning probe microscope
HITACHI HIGH TECH CORP0 citations51
US8787134B2Jul 22, 2014
Thermally assisted magnetic recording head inspection method and apparatus
HITACHI HIGH TECH CORP0 citations51
US8713710B2Apr 29, 2014
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus
HITACHI HIGH TECH CORP1 citations48
US10393509B2Aug 27, 2019
Pattern height measurement device and charged particle beam device
HITACHI HIGH TECH CORP0 citations40
HIROSE TAKENORI
3 patentsUS8148705B2Apr 3, 2012
Method and apparatus for inspecting defects of patterns formed on a hard disk medium
HIROSE TAKENORI2 citations60
US8279431B2Oct 2, 2012
Spectral detection method and device, and defect inspection method and apparatus using the same
HIROSE TAKENORI1 citations50
US8259414B2Sep 4, 2012
Magnetic recording disk having aligning pattern and method for aligning thereof
HIROSE TAKENORI0 citations50