Inventor

SERIKAWA SHIGERU

JP9 patents

⚠️ This page may combine multiple inventors who share the name “SERIKAWA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

4 patents

US8018585B2Sep 13, 2011

Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing

HITACHI HIGH TECH CORP20 citations91

US7969567B2Jun 28, 2011

Method and device for detecting shape of surface of medium

HITACHI HIGH TECH CORP18 citations83

US7898652B2Mar 1, 2011

Method and apparatus for detecting defects on a disk surface

HITACHI HIGH TECH CORP4 citations61

US7612888B2Nov 3, 2009

Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate

HITACHI HIGH TECH CORP2 citations60

SASAZAWA HIDEAKI

2 patents

US8638430B2Jan 28, 2014

Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium

SASAZAWA HIDEAKI2 citations60

US8411928B2Apr 2, 2013

Scatterometry method and device for inspecting patterned medium

SASAZAWA HIDEAKI2 citations60

HITACHI ELECTR ENG

1 patent

US6295131B1Sep 25, 2001

Interference detecting system for use in interferometer

HITACHI ELECTR ENG15 citations78

HARIYAMA TATSUO

1 patent

US8253935B2Aug 28, 2012

Disk surface inspection apparatus, inspection system thereof, and inspection method thereof

HARIYAMA TATSUO2 citations55

SERIKAWA SHIGERU

1 patent

US8781758B2Jul 15, 2014

Optical inspection method and its apparatus

SERIKAWA SHIGERU3 citations50