Inventor
WARNER RICHARD H
US12 patents
⚠️ This page may combine multiple inventors who share the name “WARNER RICHARD H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CASCADE MICROTECH INC
11 patentsUS6335628B2Jan 1, 2002
Wafer probe station for low-current measurements
CASCADE MICROTECH INC102 citations99
US6232788B1May 15, 2001
Wafer probe station for low-current measurements
CASCADE MICROTECH INC98 citations99
US5345170ASep 6, 1994
Wafer probe station having integrated guarding, Kelvin connection and shielding systems
CASCADE MICROTECH INC166 citations98
US6720782B2Apr 13, 2004
Wafer probe station for low-current measurements
CASCADE MICROTECH INC53 citations97
US6492822B2Dec 10, 2002
Wafer probe station for low-current measurements
CASCADE MICROTECH INC64 citations97
US5663653ASep 2, 1997
Wafer probe station for low-current measurements
CASCADE MICROTECH INC91 citations97
US5434512AJul 18, 1995
Wafer probe station having integrated guarding, Kelvin connection and shielding systems
CASCADE MICROTECH INC73 citations96
US5237267AAug 17, 1993
Wafer probe station having auxiliary chucks
CASCADE MICROTECH INC60 citations96
US7589518B2Sep 15, 2009
Wafer probe station having a skirting component
CASCADE MICROTECH INC10 citations92
US7492147B2Feb 17, 2009
Wafer probe station having a skirting component
CASCADE MICROTECH INC8 citations92
US7330023B2Feb 12, 2008
Wafer probe station having a skirting component
CASCADE MICROTECH INC9 citations92