Inventor
NIORI YUSUKE
JP5 patents
Patents
5 patentsUS5800618ASep 1, 1998
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD108 citations98
US5306895AApr 26, 1994
Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
NGK INSULATORS LTD157 citations98
US5280156AJan 18, 1994
Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means
NGK INSULATORS LTD406 citations98
US6101969AAug 15, 2000
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD48 citations95
US6197246B1Mar 6, 2001
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD19 citations92