P

Inventor

DIRKSEN JAMES A

US8 patents
⚠️ This page may combine multiple inventors who share the name “DIRKSEN JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

5 patents
US6293848B1Sep 25, 2001

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP86 citations97
US6527817B1Mar 4, 2003

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP25 citations92
US6350393B2Feb 26, 2002

Use of CsOH in a dielectric CMP slurry

CABOT MICROELECTRONICS CORP16 citations80
US6716755B2Apr 6, 2004

Composition and method for planarizing surfaces

CABOT MICROELECTRONICS CORP11 citations73
US6872328B2Mar 29, 2005

Method of polishing or planarizing a substrate

CABOT MICROELECTRONICS CORP8 citations71

UNIV UTAH

2 patents
US6432319B1Aug 13, 2002

Method for improving the efficiency of absorption heat pumps using a crystallization-inhibiting additive

UNIV UTAH10 citations72
US6177025B1Jan 23, 2001

Absorption heat pumps having improved efficiency using a crystallization-inhibiting additive

UNIV UTAH11 citations72

CABOT CORP

1 patent
US6319096B1Nov 20, 2001

Composition and method for planarizing surfaces

CABOT CORP32 citations92