Inventor

ARISA SHIGEHARU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “ARISA SHIGEHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO SEIMITSU CO LTD

2 patents

US6426275B1Jul 30, 2002

Method for manufacturing semiconductor chips using protecting pricing and separating sheets

TOKYO SEIMITSU CO LTD121 citations92

US6569282B1May 27, 2003

Etching apparatus

TOKYO SEIMITSU CO LTD27 citations87

ARISA SHIGEHARU

1 patent

US8152597B2Apr 10, 2012

Wafer grinding method and wafer grinding machine

ARISA SHIGEHARU2 citations54